The extracted Cauchy coefficients are valid for use at wavelengths of
400 nm to 800 nm. They correspond to the following dispersion relation:
n(l) = An + Bn / l2
+ Cn / l4 .
Resist refractive index as a function of wavelength and exposure:
| SPR500 | Ultra i-120 | 193nm resist |
Resist exposure parameters (Dill parameters):
| SPR500 | Ultra i-120 |