Robert Pearson Headshot

Robert Pearson

Associate Professor

Department of Electrical and Microelectronic Engineering
Kate Gleason College of Engineering
repemc@rit.edu
585-475-2923
Office Location
ENG-2645

Robert Pearson

Associate Professor

Department of Electrical and Microelectronic Engineering
Kate Gleason College of Engineering

Education

BS, MS, Rochester Institute of Technology; Ph.D., State University of New York at Buffalo

Bio

Dr. Robert Pearson received his BS and MS in electrical engineering from RIT and his Ph.D from SUNY Buffalo. After graduation he worked in the semiconductor industry before returning to teach at RIT as the first faculty member hired by the Microelectronic Engineering program. After helping to establish the RIT Microelectronic Engineering program he left RIT to be a founding faculty member of the Virginia Commonwealth University School of Engineering in 1997 and supervise the start-up of their new clean-room and microelectronics program. He returned to RIT in 2003 and in 2008 he became the Microelectronic Engineering program director. He teaches VLSI design, semiconductor processing, semiconductor devices, memory systems and electronics.

His research interests include semiconductor processing (devices) and micro-electro-mechanical systems design, simulation, fabrication and testing. He is a senior member of the IEEE and a life member of the Electron Devices Society and Eta Kappa Nu. He is a member of the University Government Industry Microelectronics Symposium steering committee and a member of the SEMI Advanced Semiconductor Manufacturing Conference Technical Committee.

Website: http://people.rit.edu/~repemc/

Selected recent publications and presentations

Pearson, Robert, “History of the University Government Industry Microelectronics Symposium”, 19th University Government Industry Micro/Nanoelectronics Symposium, July 2012, Berkeley CA.

Pearson, Robert; “On the Co-Evolution of Microelectronic Engineering Laboratories and Education at RIT”, 19th University Government Industry Micro/Nanoelectronics Symposium”, July 2012, Berkeley CA.

Pearson, Robert, Hirschman, Karl and Manley, Robert; “Process Model Verification for Dopant Segregation and Oxidation Enhanced Diffusion”, 17th University Government Industry Microelectronics Symposium, Louisville, Kentucky, July 2008.

Pearson, Robert; Fuller, Lynn and Puchades, Ivan; “MEMS Fabrication Course for Pressure Sensors, Flow Sensors, Fluidic Channels and Micro-Pumps”, 17th University Government Industry Microelectronics Symposium, Louisville, Kentucky, July 2008

repemc@rit.edu
585-475-2923

Select Scholarship

Published Article
Kurinec, Santosh, Michael A. Jackson, Davide Marriotti, Surendra Gupta, Sean Rommel, Dale Ewbank, Karl Hirschman, Robert Pearson,and Lynn Fuller. “Microelectronic Engineering Education for Emerging Technologies.” ASEE/IEEE Frontiers in EducationConference, 27-30 Oct. 2010. T3J-1-T3J-6. Web. É  Ëœ

Currently Teaching

MCEE-502
Semiconductor Process Integration
3 Credits
This is an advanced level course in Integrated Circuit Devices and process technology. A detailed study of processing modules in modern semiconductor fabrication sequences will be done through simulation. Device engineering challenges such as shallow-junction formation, fin FETs, ultra-thin gate dielectrics, and replacement metal gates are covered. Particular emphasis will be placed on non-equilibrium effects. Silvaco TCAD (Athena and Atlas) will be used extensively for process and electrical simulation.
MCEE-602
Semiconductor Process Integration
3 Credits
This is an advanced level course in Integrated Circuit Devices and process technology. A detailed study of processing modules in modern semiconductor fabrication sequences will be done through simulation. Device engineering challenges such as shallow-junction formation, fin FETs, ultra-thin gate dielectrics, and replacement metal gates are covered. Particular emphasis will be placed on non-equilibrium effects. Silvaco Athena and Atlas will be used extensively for process simulation. Graduate paper required.

In the News

  • July 31, 2023

    person wearing a clean suit holding up a thin piece of glass in the shape of a semicircle.

    Matt Hartensveld named as a SEMICON West 20 Under 30 future microelectronics industry leader

    From building a cleanroom in his family home while he was in high school to becoming an entrepreneur and Ph.D., it is no wonder that RIT alumnus Matt Hartensveld is viewed as a future leader in the microelectronics industry. He was recently named SEMICON West 20 under 30 awardee, given by the organization to recognize the microelectronic industry’s brightest young leaders.

  • August 18, 2021

    semiconductor computer chip.

    Podcast: The Supply Chain Struggles to Send Semiconductors 

    Intersections: The RIT Podcast, Ep. 51: Complex manufacturing processes of semiconductors and growing demands along the global supply chain for computer chips is impacting numerous industries. Robert Pearson, professor of microelectronic engineering, and Steven Carnovale, assistant professor of supply chain management, discuss how the semiconductor supply chain has been disrupted.

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