Issued Patents
| Patent No. | Issue Date | Title | Inventor(s) |
|---|---|---|---|
| 6,597,560 | 07/22/2003 | Micro-electro-mechanical varactor and a method of making and using thereof | Michael D. Potter |
| 6,577,395 | 06/10/2003 | Method for measuring a lighting condition and an apparatus thereof | Roy Berns Masayoshi Shimizu |
| 6,556,361 | 04/29/2003 | Projection imaging system with a non-circular aperture and a method thereof | Bruce W. Smith John S. Petersen |
| 6,514,353 | 02/04/2003 | Label removal system and method thereof | Newton B. Green, II Collin J. Sirco Monica M. Becker |
| 6,395,433 | 05/28/2002 | Photomask for projection lithography at or below about 160 nm and a method thereof | Bruce W. Smith |
| 6,378,374 | 04/30/2002 | Apparatus for testing a constant velocity joint and a method thereof | Kevin B. Kochersberger |
| 6,368,755 | 04/09/2002 | Masks for use in optical lithography below 180 nm | Bruce W. Smith |
| 6,309,780 | 10/30/2001 | Attenuated phase shift mask and a method for making the mask | Bruce W. Smith |
| 5,939,227 | 04/17/1999 | Multi-layered attenuated phase shift mask and a method for making the mask | Bruce W. Smith |