Internal Customers (RIT Faculty and Students)

The RIT Semiconductor Nanofabrication Lab is a user facility that relies on support from research grants and contracts. Researchers who need to use the facility for internally funded projects should include RIT Semiconductor Nanofabrication Lab fees in their proposal budgets and should consult with the Lab Operations Manager or refer to the rates for academic users below to develop an appropriate budget. Unfunded projects must be approved before they can begin and are reviewed on an annual basis.

To arrange access to the RIT Semiconductor NanoFabrication Lab facilities, contact the Lab Operations Manager to discuss the project scope and to determine if work can be done in the lab. All users must complete safety training and certification before using the facility and complete a fully executed Project Form.

For funded projects, facility and tool feeds are charged against research projects on a monthly basis. Unfunded projects are approved on an annual basis following a review of tool usage and progress at the end of each academic year.

Academic Pricing Schedule for FY24 Academic Year – 9/23 to 9/24

Maskmaking – Heidleberg DWL66

• Soda Lime mask – 5" X 5" X 0.09" – LR Chrome
  • Actual charges will be billed at internal labor and tool rates plus cost of mask blank
    • Heidelberg - $60/hr for Internal Academic - $87/hr for Ext Academic
    • SL Mask Blank ~$30 (charged at market price)
• Quartz mask – 6" X 6" X 0.25" – LR Chrome
  • Actual charges will be billed at internal labor and tool rates plus cost of mask blank
    • Heidelberg - $60/hr for Internal Academic - $87/hr for Ext Academic
    • QZ Mask Blank ~$297 (charged at market price)

Materials Charges

• Wafers – Not provided/for sale by SMFL
• Chemicals
  The SMFL provides standard photoresist and developer for use on its equipment – the cost (including disposal) is included in the price of the tool. Chemicals brought into the SMFL by the customer will be accessed a disposal fee depending on the nature of the waste. Fees will be higher for metal etchants, solvent/acid mixtures, and others that must be sent out for disposal.

Notes

• Users are free to obtain their own supplies, but RIT carries no responsibility to supply storage space for materials stockpiles. Chemicals must be approved and properly shipped before being brought into the SMFL. Users will be charged up front for disposal fees incurred.
• Repair parts for tools and equipment above and beyond normal wear and tear may also be charged back to the user on a cost basis not including SMFL labor.
• Materials charges include but are not limited to consumable chemicals, sputter targets, evaporation sources, photographic film, and labware.
• Incidental materials such as aluminum targets and evaporants (Al, Cu, Cr), standard lithography chemicals, standard CVD and etch gases, bulbs for aligners are covered under the equipment fee schedule.
• The user may be asked to pay a surcharge for equipment/materials usage above and beyond normal usage.
• This would be negotiated before the work started.

Equipment Set Rates

Internal Academic * External Academic*
Monthly Fee $40 / Month / User $60 / Month / User

Tool Set Internal Academic External Academic
Tier 1 Tools $25 / hr $37 / hr

Tool Set Internal Academic External Academic
Tier 2 Tools $40 / hr $58 / hr

Tool Set Internal Academic External Academic
Tier 3 Tools $60 / hr $87 / hr

 Internal Academic External Academic
New User Fee $100 / User $100 / User

* If a user is actively working on more than one project in the month, then each project is charged the
monthly fee for that user.

• Internal Unfunded projects will be accessed $75 per month per user.

New User Fees (one-time training charge, in-person lab access only)

Approvals

Internal RIT Academic Users must submit an approved Project Request Form before any work may
proceed. External Academic Users should submit a Proposal for Work.

Billing Process – Academic

The SMFL will bill funded researchers for their work to be performed in the SMFL. Journal entries
against the researchers Oracle account are typically performed at the end of each month.

External Academic users will receive a copy of their invoice for comment before the final invoice is sent.

Notes

An overnight pumpdown on our PVD tools (processing run occurring the following morning) is charged
out at 5 hours.

Monthly

• All laundry/Wipes/Lapware
• Some share of facilities - DI, Air Basic Chemistry - Acetone/IPA
• All Microscopes Rudolph Ellipsometer
• CDE Resmap 4 point probe
• Prometrix SM300 Spectramap
• Tencor P2 Profilometer
• Woolum VASE
• Wyko NT1100 Dynamic Profiler

Tier 1

• CEE 100 Developer
• CEE Resist Coaters (3)
• KS MA150 Aligner
• KS MLB4 Contact Aligner
• LAM 490 Plasma Etcher
• Technics PE2A
• Trion Apollo Asher
• Wet Benches - All

Tier 2

• ADT Dicing Saw
• AG 610A
• AME P5000 PECVD/RIE
• ASM 150mm LPCVD
• Bruce Furnace Tubes
• CHA Ebeam Evaporator
• CHA Flash Evaporator
• CVC 601 Sputter
• CVC Evaporator Glass Jar
• Denton Au Sputter
• GCA Stepper
• PE4410 Sputter
• STS ASE
• SVG Tracks (2)
• Trion Minilock RIE
• Trion Phantom III ICP RIE
• Trion Phantom III RIE
• Ultratech ALD
• Xactics XeF2 Etcher

Tier 3

• ASML Stepper
• Heidelberg DWS Laser Writer
• Plasmatherm Apex ICP Etcher Trion PECVD
• Varian 350D Implanter