Micro-electro-mechanical (MEMs)
Micro-electro-mechanical (MEMs) for Sensing, Photonic and RF applications:
- Resonating piezoresistive MEMS oil viscosity and temperature multisensors.
- Hyper-sentivitive (< 10 Pa) MEMS pressure sensors.
- Piezoelectric resonators.
![SEM of hyper-sentivitive (< 10 Pa) MEMS pressure sensor array](/nanofab/sites/rit.edu.nanofab/files/images/paragraph/image-card/image10.jpg)
SEM of hyper-sentivitive (< 10 Pa) MEMS pressure sensor array
![Wheatstone bridge configuration to measure deflection of a 300-nm-thick hyper-sentivitive (< 10 Pa) MEMS pressure sensors](/nanofab/sites/rit.edu.nanofab/files/images/paragraph/image-card/image30.jpg)
Wheatstone bridge configuration to measure deflection of a 300-nm-thick hyper-sentivitive (< 10 Pa) MEMS pressure sensors
![Resonating piezoresistive MEMS oil viscosity and temperature multisensor](/nanofab/sites/rit.edu.nanofab/files/images/paragraph/image-card/image3.jpg)
Resonating piezoresistive MEMS oil viscosity and temperature multisensor