Micro-electro-mechanical (MEMs)

A very small 3D printed RIT Tiger. Smaller than a human hair.
 

Micro-electro-mechanical
(MEMs)

Micro-electro-mechanical (MEMs) for Sensing, Photonic and RF applications:

  • Resonating piezoresistive MEMS oil viscosity and temperature multisensors.
  • Hyper-sentivitive (< 10 Pa) MEMS pressure sensors.
  • Piezoelectric resonators.
SEM of hyper-sentivitive (< 10 Pa) MEMS pressure sensor array

SEM of hyper-sentivitive (< 10 Pa) MEMS pressure sensor array

Wheatstone bridge configuration to measure deflection of a 300-nm-thick hyper-sentivitive (< 10 Pa) MEMS pressure sensors

Wheatstone bridge configuration to measure deflection of a 300-nm-thick hyper-sentivitive (< 10 Pa) MEMS pressure sensors

Resonating piezoresistive MEMS oil viscosity and temperature multisensor

Resonating piezoresistive MEMS oil viscosity and temperature multisensor